Wright Williams & Kelly
Offers Free Web Based Defect Target Calculator

February 10, 2000 (Pleasanton, CA) - Wright Williams & Kelly (WWK) announced today the availability of a free web based defect target calculator designed to help users of the International Technology Roadmap for Semiconductors (ITRS) predict fault specifications. The random defect targets recently released by the Semiconductor Industry Association (SIA) are based on predefined technology nodes using data collected by SEMATECH member companies on 164 tools, which are divided into 30 generic tool categories.

"The ITRS roadmap has grown in complexity," states Daren L. Dance, WWK's Vice President of Technology and a member of the roadmap committee's defect reduction technical working group. "Even with the additional targets for memory and logic products, rarely do actual circuit line widths and areas match the ITRS technology node assumptions. We developed the defect target calculator to help semiconductor suppliers and manufacturers compare the roadmap targets to their current or planned needs."

"The defect target calculator allows users to confidentially enter key parameters for a selected tool and estimate a defect target for a specific chip. The only parameters required are the chip area, minimum line width, mask levels, and random defect-limited yield requirement. We use the same scaling method and generic tool categories as the roadmap to provide specific target estimates. Posting the calculator on our web site makes this service widely available and makes the roadmap more useful."

The calculator can be accessed free of charge at:

Defect Target Calculator

Additional information about the ITRS roadmap can be found at:

http://www.semichips.org

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