This document will outline the example values that have been approved as an addendum to the SEMI® E35 cost of ownership guideline B. These and other values are used as defaults in TWO COOL® v2.1.1 and later.
This related information is not an official part of SEMI® E35 and is not intended to modify or supersede the official standard. Publication was authorized by vote of the SEMI® Metrics Committee. These values are provided only as examples. Actual values should be determined by considering company experience, specific tool characteristics, applications, process technology, product type, regional differences, and analysis objectives. Determination of the suitability of the material is solely the responsibility of the user.
||Input Parameter||150 mm Example1||200 mm Example2||300 mm Example3
|Labor and Salary Rates
|Test Wafer Cost||$5.50||$100||$500|
|Test Wafer Reuse Times*||1||10||10|
|Life of Equipment Years||5||7||7|
|Depreciation Life Years||N/A||5||5|
|Depreciation Method||Straight Line||Straight Line||Straight Line|
|Defect Fault Probability||0.167||0.05||0.08|
|Installation Cost as Percent of Equipment Cost
|Parameters With No Example Values
* Revised from 1995 version
1 Derived from SEMATECH Cost of Ownership Rev. B December 1990.
2 Approved, Metrics Committee, July 11, 1995.
3 Derive from joint Selete and International 300mm Initiative (I300I) inputs, 1997.